The W.M. Keck Center for Nanoscale Optofluidics has a dedicated
nanofabrication facility in 268 Baskin Engineering. The lab houses a
FEI Quanta 3D FEG dual beam SEM/FIB nanofabrication instrument for
fabrication, imaging, and characterization of nanoscale optofluidic
FEI Quanta 3D FEG dual beam SEM/FIB
In addition, researchers have access to the shared microfabrication cleanroom facility in Baskin Engineering and to state-of-the art research facilities in the center members’ labs.