The W.M. Keck Center for Nanoscale Optofluidics has a dedicated
nanofabrication facility in 268 Baskin Engineering. The lab houses a
FEI Quanta 3D FEG dual beam SEM/FIB nanofabrication instrument for
fabrication, imaging, and characterization of nanoscale optofluidic
devices. |
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FEI Quanta 3D FEG dual beam SEM/FIB Capabilities and recharge rates
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In addition, researchers have access to the shared microfabrication cleanroom facility in Baskin Engineering and to state-of-the art research facilities in the center members’ labs.